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有人已经考虑将暗视野检测用于检测薄晶圆缺陷。基于光学技术,暗视野是指进行较低角度反射光测量。 暗视野对于晶圆前端检测是有效的,但是由于研磨造成晶圆背面粗糙,对于背面检测它是无效的。因此,晶圆背面研磨后应避免暗视野检测。

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UnitySC delivers visionary technologies that foster progress for people. We are recognized as a key player in inspection and metrology combining advanced technologies to enable higher yields and faster time to market.

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