Micro Electro Mechanical Systems (MEMS) are more than ever part of our daily life. Used in consumer electronics, automotive, telecom, medical and industrial markets, sensors and actuators such as pressure, gyroscope, accelerometer, RF filter, microphone, or inkjet to name a few are manufactured by using some similar processes than semiconductor processes.
UnitySC developed specific solution to support MEMS applications with our TMAP Series. TMap Series meets MEMS manufacturing company requirements with its versatility. List of typical measurements includes cavity dimensions, membrane thickness and shape, CDs, bonding interface, overlay, TTV, bow, warp.
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